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5708009-C 6-9
Apex 1 to 5.5 kW Generator
E020
User interlock
open
When the AC On LED is lit and the Interlock LED
is not lit, this means either the interlock is not
satisfied or was interrupted. Both the interlock LED
and the RF output will remain off until the interlock
is satisfied and an RF off command is given.
Make sure that the
RF output cover is
firmly attached and
ensure the interlock
pins on the User port
are satisfied. Refer to
“Apex User Port
Options” on
page 4-2.
or
See “Interlock LED
is not Lit” on
page 6-5.
E025
Target life
expired
When the user set target life ends, this error code is
reported. The output will not be turned off when the
error is reported. However, once the output is turned
off while this error is active, it cannot be turned on
until a new target life is set
Set new target life
then send RF On
command to reset
unit.
E029 Ripple
Current Error
(missing phase)
The input line voltage is rectified internally to a bus
voltage. The Apex generator monitors the bus
voltage for excessive ripple. If excessive ripple is
detected, this error is displayed. A missing phase on
the input line voltage or an unstable plasma may
cause this error.
Verify that all three
phases are present on
the input voltage
lines and that the
plasma is stable. If
the problem persists
call AE Global
Support.
E033
Temperature
Rate Threshold
error
The Apex unit monitors the rate at which the cold
plate temperature is changing. If the temperature
increases too fast, the Apex generator protects itself
by shutting the output off.
To clear the error,
send RF OFF
command to reset the
unit; if error code
does not clear or if
the output does not
come on, the cooling
plate temperature
exceeded the over
temperature
shutdown threshold.
See “Overtemp LED
on Solid” on
page 6-4.
Table 6-1. Error Code Table (Continued)
Error Code Error Code Description Solution