6.3.2
6 - 27
5 axis moving
SetStagePosition (X as Long, Y as Long, Z as Long, T as Long, R as Long) as
Long
X 0 to 100000000 : (nm) 100 nm Step
Y 0 to 50000000 : (nm) 100 nm Step
Z 5000000 to 70000000 : (nm) 100000 nm Step
T -20000 to 90000 : x1000 (deg) 0.1 deg Step
R 0 to 359900 : x1000 (deg) 0.1 deg Step
Return 0: Normal receiving
Excluding 0: Abnormal receiving
Comment: The stage is moved by 5 axis (X, Y, Z, T, R)
Setting.
The method is finished at completion of
command analysis.
The completion of SetStagePosition is
notified by the StagePositionFinished event.
If the return value is not 0, the
StagePositionFinished event is not issued.
The StagePositionChange event is
periodically generated while the stage is
moving.
Please do not use other method until
receiving the StagePositionFinished event.
If the sample size is selecting 50 x 5 mm, 30
x 10 mm or EBSP, it is not possible to move
by external communication.
So, StagePositionFinished event generate
the ErrCode 1 (Impracticable).
