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3.7 Slit Chamber Air Inlet Valves: (optional)
An air inlet valve is supplied to bring the slit chamber to atmospheric pressure and is located
on the side of the slit housing. The valve is open when the handle is in line with the valve
body, and closed when the handle is 90 degrees to the valve body.
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CAUTION: Make sure that the isolation valve is closed
before opening slit chamber air inlet valve!
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3.8 Slit Chamber Roughing Valves: (optional)
A slit chamber roughing valve is supplied for connection to an auxiliary mechanical pump for
rough pumping of the slit chamber. The valve is open when the handle is in line with the valve
body, and closed when the handle is 90 degrees to the valve body.
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CAUTION: Make sure that the isolation valve and the air inlet valve are closed
before opening roughing valve!
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